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Updated: Jun 8, 2026

Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Norimasa Yoshimizu1, Amit Lal, Clifford R Pollock
1SonicMEMS Laboratory, School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA. ny22@cornell.edu
This study presents a new optical ruler for precise wafer-scale nanometrology. The system achieves sub-20 nm positioning accuracy and long-term stability using a quasiperiodic aperture array.
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