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Updated: Jun 8, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Dani Guzmán1, Francisco Javier de Cos Juez, Richard Myers
1Pontificia Universidad Católica de Chile, Electrical Engineering Department, Vicuña Mackenna 4860, Santiago, Chile. cdguzman@ing.puc.cl
Researchers modeled micro-electro-mechanical deformable mirrors using non-parametric estimation for adaptive optics. This technique achieved low positioning errors, improving wavefront correction accuracy for telescopes and optical systems.
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