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Updated: Jun 8, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Modeling a MEMS deformable mirror using non-parametric estimation techniques
Dani Guzmán1, Francisco Javier de Cos Juez, Richard Myers
1Pontificia Universidad Católica de Chile, Electrical Engineering Department, Vicuña Mackenna 4860, Santiago, Chile. cdguzman@ing.puc.cl
Abstract:
Using non-parametric estimation techniques, we have modeled an area of 126 actuators of a micro-electro-mechanical deformable mirror with 1024 actuators. These techniques produce models applicable to open-loop adaptive optics, where the turbulent wavefront is measured before it hits the deformable mirror. The model's input is the wavefront correction to apply to the mirror and its output is the set of voltages to shape the mirror. Our experiments have achieved positioning errors of 3.1% rms of the peak-to-peak wavefront excursion.

