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Tolerances in microlens fabrication by multilevel etching and mass-transport smoothing
Applied Optics
|October 14, 2010
Abstract:
A method is developed for the quantitative assessment of microlens deficiencies caused by inaccuracies in the multistep mesa fabrication or by incomplete mass-transport smoothing. Analytical expressions are obtained and tolerable imperfections are deduced for the practical effort-saving fabrication of highperformance micro-optical elements.
