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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
Published on: October 11, 2016
Very-large-scale-integration fabrication technique for binary-phase gratings on sapphire
Applied Optics
|October 22, 2010
Abstract:
An efficient, high-yield process for the production of binary-phase holograms is presented by controlled deposition of silicon nitride over a sapphire substrate with the binary structure formed by plasma etch of the silicon nitride. Optical results are presented for a 16 × 16 transmission fanout element that shows near-optimal performance.
