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Updated: Jun 7, 2026

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)
Published on: June 17, 2017
The era of carbon allotropes
1Department of Chemistry and Pharmacy & Interdisciplinary Center of Molecular Materials (ICMM), Friedrich-Alexander-University Erlangen-Nuremberg, Henkestrasse 42, 91054 Erlangen, Germany. andreas.hirsch@chemie.uni-erlangen.de
No abstract available in PubMed .
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