High spatial resolution ellipsometer for characterization of epitaxial graphene

Peter E Gaskell1, Helgi S Skulason, Wlodek Strupinski

  • 1Department of Electrical and Computer Engineering, McGill University, 3480 University Street, Montreal, H3A-2A7, Canada. peter.gaskell@mail.mcgill.ca

Optics Letters
|October 23, 2010
PubMed
Summary

This study demonstrates a high-resolution ellipsometer capable of accurately measuring graphene layers. The technique achieves single-atomic-layer sensitivity, crucial for characterizing graphene films.