Updated: Jun 7, 2026

Process of Making Three-dimensional Microstructures using Vaporization of a Sacrificial Component
Published on: November 2, 2013
Yaseen Elkasabi1, Joerg Lahann
1Material Science and Engineering, University of Michigan, Ann Arbor, MI, USA.
This study explores microscale surface patterning using chemical vapor deposition polymerization. It details methods for creating reactive poly(p-xylylene) coatings for biomolecule immobilization.
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