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Updated: Jun 7, 2026

Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
Published on: December 21, 2015
Microporous silica thin films with low refractive indices and high Young's modulus
Wataru Shimizu1, Yasushi Murakami
1Division of Chemistry and Materials, Faculty of Textile Science and Technology, Shinshu University, 3-15-1 Tokida, Ueda, Nagano 386-8567, Japan. wats@shinshu-u.ac.jp
Abstract:
A microporous silica thin film with low refractive index (low-n) of 1.27 and high Young's modulus of 19.5 GPa was obtained by sol-gel synthesis using hydroxyacetone catalyst with tetramethyl orthosilicate and water in ethanol. Transmission electron microscope images and nitrogen adsorption-desorption measurements showed that the pores in the synthesized silica were <1 nm in diameter. Unlike many other microporous synthesis methods, our method did not require sacrificial reagents as templates. This allowed low-temperature fabrication of high-strength low-n silica.

