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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Two color multichannel heterodyne interferometer set up for high spatial resolution electron density profile

P Pedreira1, L Esteban, A R Criado

  • 1Department of Electronics Technology, Universidad Carlos III de Madrid, Leganes, Madrid 28911, Spain. ppedreir@ing.uc3m.es

The Review of Scientific Instruments
|November 2, 2010
PubMed

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