Channel-optical-waveguide fabrication based on electron-beam irradiation of polyimides

A new-channel-waveguide-fabrication process for use with polyimide is described. The new technique uses an electron-beam-induced effect to alter the refractive index of the polyimides directly. Channel waveguides with an 8-µm-wide, 8-µm-deep core have been fabricated on a polyimide film by the use of electron-beam irradiation. Only one kind of polyimide (6FDA/TFDB) was used in this waveguide. The difference in refractive index between the core and the cladding was approximately 0.30% for both TEand TM-polarized incident light when the dose was 1500 µC/cm(2), which was sufficient to produce waveguides. The optical properties of the waveguide are also demonstrated.