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ISICL: In situ coherent lidar for particle detection in semiconductor-processing equipment.

|November 2, 2010

Summary

A novel laser radar sensor detects tiny particles in harsh environments. This highly sensitive system requires minimal access and overcomes intense background light for accurate particle mapping.

Area of Science:

Physics
Optical Engineering
Instrumentation

Background:

Detecting submicrometer particles in hostile environments is challenging.
Existing methods often require multiple access points or are sensitive to background noise.

Purpose of the Study:

To describe a scanning coherent lidar (laser radar) system for detecting and mapping isolated submicrometer particles.
To present a novel sensor design that operates in challenging industrial settings.

Main Methods:

Utilized a noise-canceled diode laser homodyne interferometer.
The system is designed for misalignment tolerance and quantum-limited operation.
Employed techniques to achieve immunity to intense stray and scattered light.

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Main Results:

The sensor requires only 50 photons for particle detection at a 10(-5) Hz false-count rate.
Demonstrated robustness against background light sources up to 10(6) times more intense than the signal.
The system requires only one access window for operation.

Conclusions:

The developed lidar sensor is effective for detecting and mapping submicrometer particles in inaccessible regions.
The novel interferometer design offers high sensitivity and noise immunity.
This technology is suitable for applications in plasma chambers, ovens, tanks, and pipes.