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Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry.

J Schmit, K Creath

|November 6, 2010

Summary

New phase-shifting interferometry algorithms reduce errors from phase-shift miscalibration and detector nonlinearity. Extended averaging techniques yield improved 5- and 6-frame algorithms with lower phase errors compared to traditional methods.

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Area of Science:

Optical Metrology
Interferometry
Wavefront Sensing

Background:

Phase-shifting interferometry (PSI) is susceptible to phase-shift miscalibration and detector nonlinearity.
Accurate wavefront phase calculation requires algorithms tolerant to these systematic errors.

Purpose of the Study:

To develop novel PSI algorithms with enhanced tolerance to phase-shift miscalibration and detector nonlinearity.
To extend existing error-compensating algorithm derivation methods.

Main Methods:

An extended averaging technique was sequentially applied to derive new PSI algorithms.
Two classes of algorithms were developed, based on 3-frame and 4-frame techniques, extending to six frames.
Computer simulations and spectral analysis of sampling functions were used to evaluate algorithm performance.

Main Results:

New 5-frame and 6-frame algorithms were derived.
These novel algorithms demonstrate reduced phase errors due to phase-shifter miscalibration compared to conventional 3-, 4-, and 5-frame algorithms.
Analysis confirmed the error reduction capabilities of the new algorithm classes.

Conclusions:

The proposed extended averaging method effectively generates PSI algorithms with improved robustness.
The new 5- and 6-frame algorithms offer superior accuracy in phase measurement under realistic error conditions.
This work provides advanced tools for precise wavefront analysis in optical metrology.