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A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
Published on: January 7, 2019
Optical fiber accelerometer based on a silicon micromachined cantilever
Applied Optics
|November 12, 2010
Summary
A new fiber-optic accelerometer uses backreflection and a silicon cantilever to measure acceleration. This sensor is ideal for rotating machines, offering high linearity and low temperature sensitivity.
Area of Science:
- Optoelectronics
- Mechanical Engineering
- Sensor Technology
Background:
- Fiber-optic sensors offer advantages in harsh environments.
- Accurate acceleration and vibration measurement is crucial for rotating machinery monitoring.
Purpose of the Study:
- To develop and test an intensity-modulated fiber-optic accelerometer.
- To evaluate its performance for applications in rotating machines.
Main Methods:
- Utilized backreflection effects in a multimode fiber.
- Integrated a micromachined silicon cantilever for intensity modulation.
- Placed the fiber at the center of a spherical mirror.
Main Results:
- Achieved amplitude linearity of ±1.2% (0.1-22 m s⁻²).
- Demonstrated frequency linearity of ±1% (0-100 Hz).
- Exhibited low temperature sensitivity (<0.03%/°C).
Conclusions:
- The developed fiber-optic accelerometer is suitable for rotating machine monitoring.
- The sensor is compatible with wavelength-division multiplexing networks.
