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Related Experiment Video

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Nanofabrication of Gate-defined GaAs/AlGaAs Lateral Quantum Dots
15:47

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Published on: November 1, 2013

Small-feature-size fan-out kinoform etched in GaAs.

J Bengtsson, N Eriksson, A Larsson

    Applied Optics
    |November 12, 2010
    PubMed
    Summary

    This study presents a binary fan-out kinoform for beam splitting, achieving a 4x4 spot array. Rigorous Fresnel-Kirchhoff design improved accuracy, overcoming distortions found with simpler Fresnel-diffraction theory.

    Area of Science:

    • Optics and Photonics
    • Diffractive Optics
    • Semiconductor Fabrication

    Background:

    • Kinoforms are diffractive optical elements used for beam manipulation.
    • Fabricating kinoforms with high precision is crucial for optical applications.
    • Gallium Arsenide (GaAs) is a suitable material for optical devices due to its properties.

    Purpose of the Study:

    • To design, fabricate, and evaluate a binary fan-out kinoform for splitting a single beam into a 4x4 array.
    • To compare the effectiveness of Fresnel-diffraction theory versus the Fresnel-Kirchhoff expression for kinoform design.
    • To assess the efficiency and uniformity of the fabricated kinoform.

    Main Methods:

    • Design of a binary fan-out kinoform using diffraction theories.
    • Fabrication using electron-beam lithography and chemically assisted ion-beam etching in GaAs.

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  • Optical evaluation using a 0.98 µm wavelength laser from a single-mode fiber.

    • Main Results:

    • A 4x4 spot array was successfully generated with a maximum deflection angle of 28°.
    • The fabricated kinoform achieved an efficiency of 34% with a 29% uniformity error for the spots.
    • The Fresnel-Kirchhoff design approach eliminated distortions observed with the simpler Fresnel-diffraction theory.

    Conclusions:

    • The Fresnel-Kirchhoff expression provides a more accurate design for fan-out kinoforms compared to customary Fresnel-diffraction theory.
    • Binary fan-out kinoforms can be fabricated in GaAs with high-resolution techniques for optical beam splitting.
    • Scalar diffraction theory is applicable even for kinoform feature sizes close to two wavelengths.