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Calibration standard for laser beam profilers: method for absolute accuracy measurement with a Fresnel diffraction

T F Johnston, J M Fleischer

    Applied Optics
    |November 19, 2010
    PubMed
    Summary
    This summary is machine-generated.

    This study validates a laser beam profiler

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    Area of Science:

    • Optical Metrology
    • Laser Beam Characterization

    Background:

    • Accurate measurement of laser beam parameters is crucial for various applications.
    • Existing calibration methods for laser beam profilers may lack sufficient precision.
    • International Standards Organization (ISO) is developing standards for laser beam measurements.

    Purpose of the Study:

    • To establish an absolute accuracy calibration standard for clip-level laser beam profilers.
    • To validate a novel test method using Fresnel diffraction patterns.
    • To assess the profiler's accuracy to the 0.3% level.

    Main Methods:

    • Utilized a Fresnel diffraction test pattern generated by opposed knife edges.
    • Measured the pattern width using the 50% cut points of a scanning knife edge pair.
    • Modeled the convolution of the scanning aperture with the diffraction pattern to correct for aperture size.

    Main Results:

    • Achieved an absolute accuracy measurement of the laser beam profiler to the 0.3% level.
    • Demonstrated that the Fresnel diffraction pattern method is a viable calibration standard.
    • Developed a method to determine the scanning aperture width.

    Conclusions:

    • The described test method is an acceptable calibration standard for optical profilers.
    • This method supports the development of ISO standards for laser beam parameter measurements.
    • The validated profiler accuracy meets stringent metrology requirements.