Theoretical optimisation of the side-wall of micropillar array columns using computational fluid dynamics.

Joris Vangelooven1, Gert Desmet

  • 1Vrije Universiteit Brussel, Department of Chemical Engineering (Transport Modelling & Analytical Separation Science-group), Pleinlaan 2, 1040 Brussels, Belgium.

Summary

This study optimizes micro-pillar array column side-wall positions using computational fluid dynamics. Ideal positions enhance lithography resolution, allowing smaller pillar diameters for improved manufacturing.

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