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Updated: Jun 6, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron

Peng Wang1, Gavin Behan, Angus I Kirkland

  • 1Department of Materials, University of Oxford, Parks Road, Oxford OX13PH, UK.

Ultramicroscopy
|November 25, 2010
PubMed

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