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Updated: Jun 6, 2026

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Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
Silicon nanophotonic devices for integrated lab-on-a-chip sensing
Babak Momeni1, Siva Yegnanarayanan, Mohammad Soltani
1Fred Hutchinson Cancer Research Center, Seattle, WA 98109, USA. bmomeni@fhcrc.org
Summary
We developed advanced nanophotonic devices using silicon microresonators and on-chip spectrometers for integrated sensing. These compact platforms offer strong light-matter interaction, paving the way for low-power, portable multi-purpose sensors.
Area of Science:
- Photonics
- Nanotechnology
- Integrated Optics
Background:
- Integrated sensing platforms require compact devices with strong light-matter interactions.
- Silicon photonics offers a promising platform for miniaturized optical devices.
Purpose of the Study:
- To present progress in designing nanophotonic devices for integrated sensing.
- To explore silicon-based microresonators and on-chip spectrometers as key components for sensing platforms.
Main Methods:
- Design and fabrication of Si-based microresonators.
- Development of on-chip spectrometers.
- Integration of these components into compact sensing platforms.
Main Results:
- Demonstrated strong light-matter interaction in the designed nanophotonic devices.
- Evaluated the performance of Si-based microresonators and spectrometers.
- Addressed the potential for multi-purpose sensing capabilities.
Conclusions:
- Nanophotonic devices based on Si microresonators and spectrometers are viable for integrated sensing.
- These platforms show promise for future low-power, low-cost, portable, and multi-purpose sensing systems.

