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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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Published on: February 4, 2018

Pressure-tunable guided-mode resonance sensor for single-wavelength characterization.

Steven Foland¹, Kyung-Hak Choi, Jeong-Bong Lee

¹Department of Electrical Engineering, University of Texas at Dallas, Richardson, Texas 75080, USA. sjf041000@utdallas.edu

|December 3, 2010

Summary

This study demonstrates a tunable guided-mode resonance grating using an air-pressure-responsive membrane. The device allows for refractive index tuning across a range of 1.33 to 1.50 by applying lateral strain via air pressure.

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Last Updated: Jun 6, 2026

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Area of Science:

Photonics and optical materials science
Nanotechnology and metamaterials
Sensor technology

Background:

Guided-mode resonance (GMR) gratings offer label-free sensing capabilities.
Tuning GMR devices typically requires external components or complex fabrication.
Developing adaptable and integrated tuning mechanisms is crucial for practical applications.

Purpose of the Study:

To demonstrate a novel method for tuning a one-dimensional GMR grating.
To investigate the use of an air-pressure-responsive membrane for grating strain application.
To explore the tunability of refractive index sensing using this approach.

Main Methods:

Finite-element method (FEM) simulations were employed to model the GMR device.
The device comprises a titanium dioxide (TiO2) grating embedded in a polydimethylsiloxane (PDMS) membrane.
Air pressure variations (up to 5500 Pa) were simulated to induce lateral strain.

Main Results:

The simulated GMR device exhibited tunable resonant responses to TM-polarized light.
Lateral strain applied via air pressure successfully tuned the grating's resonant wavelength.
The device demonstrated tunability for medium refractive indices ranging from 1.33 to 1.50.
A fixed-wavelength 850 nm light source was utilized in the simulations.

Conclusions:

An air-pressure-responsive membrane provides an effective method for tuning GMR gratings.
This approach enables dynamic refractive index sensing over a significant range.
The simulated TiO2/PDMS GMR device shows promise for integrated and adaptable optical sensing applications.