Multilayer metal/metal-oxide diffractive structure for photonic temperature sensing

We designed and fabricated multilayer metal/metal-oxide surface relief diffractive grating structures by growing alternating Pt and SnO(x) layers. Optical interrogation at 633 nm reveals the temperature dependence of their reflection and transmission diffractive effects. This function is explored here in the context of a remote, spatially localized, photonic temperature sensing operation, achieving sensitivity of 10% per °C for the zeroth-order in the transmission mode. The experimental demonstration is found to be in good agreement with the results of rigorous coupled wave analysis of the composite metal/metal-oxide element.