Integrated optic head for sensing a two-dimensional displacement of a grating scale

An integrated optic sensor head was proposed for sensing a two-dimensional displacement of a scale consisting of crossed gratings. Two interferometers, crossing each other, are constructed by the integration of two pairs of linearly focusing grating couplers (LFGC's) and two pairs of photodiodes (PD's) on a Si substrate. Four beams radiated by the LFGC's from the sensor head overlap on the grating scale, and the beams are diffracted by the grating scale and interfere on the PD's. The period of the interference signal variation is just half of the scale grating period. The device was designed and fabricated with a grating scale of 3.2-μm period, and the sensing principle was experimentally confirmed.