Related Experiment Video
Updated: Jun 6, 2026
08:23
A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings
Published on: September 30, 2019
Integrated optic head for sensing a two-dimensional displacement of a grating scale
Applied Optics
|December 4, 2010
Summary
This study introduces an integrated optic sensor for precise two-dimensional displacement measurement using crossed gratings. The novel sensor head, built on a silicon substrate, successfully confirmed its sensing principle through experimental validation.
Area of Science:
- Optoelectronics
- Nanotechnology
- Metrology
Background:
- Accurate two-dimensional displacement sensing is crucial for various scientific and industrial applications.
- Existing methods may face limitations in precision, integration, or cost-effectiveness.
Purpose of the Study:
- To propose and demonstrate an integrated optic sensor head for sensing two-dimensional displacement.
- To utilize crossed gratings and interferometry for high-resolution position sensing.
Main Methods:
- Design and fabrication of an integrated optic sensor head on a silicon substrate.
- Integration of two pairs of linearly focusing grating couplers (LFGCs) and two pairs of photodiodes (PDs).
- Utilizing two crossing interferometers to overlap and diffract beams on a grating scale.
Main Results:
- The sensor head successfully measures two-dimensional displacement of a crossed grating scale.
- The interference signal variation period was confirmed to be half the grating scale period.
- Experimental validation of the proposed sensing principle was achieved with a 3.2-μm period grating scale.
Conclusions:
- The integrated optic sensor head offers a promising approach for precise 2D displacement sensing.
- The use of LFGCs and interferometry on a Si substrate enables compact and efficient sensor design.
- This technology has potential applications in high-precision positioning and metrology systems.
