Restraint of tool path ripple based on surface error distribution and process parameters in deterministic finishing

Area of Science:

• Optics and Materials Science
• Precision Engineering
• Surface Metrology

Background:

• Deterministic finishing processes can introduce microfabrication errors, particularly from regular tool paths.
• Residual errors in optical component fabrication impact performance and require mitigation strategies.

Purpose of the Study:

• To investigate the influence of regular tool paths on microfabrication errors in deterministic finishing.
• To develop and validate a novel random pitch tool path for reducing residual surface errors.
• To enhance the surface accuracy of optical components through corrective polishing.

Main Methods:

• Simulations were conducted to analyze the impact of tool path strategies on surface errors.
• A random pitch tool path was designed based on surface error distribution and process parameters.
• Experimental polishing of a nucleated glass flat mirror was performed using the developed method on a custom UPF700-7 installation.

Main Results:

• Surface accuracy of the glass flat mirror improved from λ/30 (RMS, 90% aperture) to λ/200 in 5 minutes.
• Medium-high spatial frequency errors induced by regular tool paths were effectively restricted.
• Experimental results validated the simulation accuracy and the efficacy of the random pitch tool path.

Conclusions:

• The random pitch tool path is a viable and effective strategy for reducing microfabrication errors in deterministic finishing.
• This method significantly enhances surface accuracy and controls spatial frequency errors in optical component polishing.
• The study demonstrates a successful integration of simulation and experimental validation for advanced optical fabrication techniques.