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Updated: Jun 5, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Miniaturized multimodal CARS microscope based on MEMS scanning and a single laser source
Sangeeta Murugkar1, Brett Smith, Prateek Srivastava
1School of Information Technology and Engineering (SITE), University of Ottawa 800 King Edward, P.O. Box 450, Stn A, Ottawa, Ontario, K1N 6N5, Canada. murugkar@site.uottawa.ca
We developed a compact multimodal microscope using microelectromechanical systems (MEMS) scanning mirrors. This novel device achieves high-resolution Coherent Anti-Stokes Raman Scattering (CARS), TPEF, and SHG imaging, paving the way for handheld in vivo probes.
Area of Science:
- Optics and Photonics
- Biomedical Engineering
- Microscopy
Background:
- Coherent Anti-Stokes Raman Scattering (CARS) microscopy offers label-free chemical imaging.
- Miniaturization of advanced microscopy techniques is crucial for in vivo applications.
Purpose of the Study:
- To demonstrate a novel miniaturized multimodal CARS microscope.
- To enable simultaneous CARS, two-photon excitation fluorescence (TPEF), and second harmonic generation (SHG) imaging.
Main Methods:
- Utilized microelectromechanical systems (MEMS) scanning mirrors and custom miniature optics.
- Employed a single Ti:sapphire femtosecond pulsed laser as the light source.
- Integrated CARS, TPEF, and SHG imaging modalities.
Main Results:
- Achieved high-resolution and distortion-free multimodal imaging.
- Successfully imaged various samples including a USAF target, microspheres, and biological tissue.
- Demonstrated proof of concept for the miniaturized microscope.
Conclusions:
- The developed miniaturized multimodal CARS microscope is a viable technology.
- This technology enables advanced imaging for diverse applications.
- Paves the way for handheld probes for non- or minimally-invasive in vivo imaging.
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