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Two-frame algorithm to design quadrature filters in phase shifting interferometry.

J F Mosiño¹, J C Gutiérrez-García, T A Gutiérrez-García

¹Universidad Tecnológica de León, Blvd. Universidad Tecnológica # 225 San Carlos, León, Gto. 37670, México. jfmosino@gmail.com

|December 18, 2010

Summary

This study introduces a novel method for designing tunable quadrature filters essential for phase shifting interferometry. The technique enables precise filter design for accurate optical metrology applications.

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Area of Science:

Optical Engineering
Metrology
Signal Processing

Background:

Phase shifting interferometry (PSI) is a widely used technique for precise surface measurement.
Accurate quadrature filter design is critical for minimizing errors in PSI.
Existing methods may lack tunability or flexibility for diverse PSI applications.

Purpose of the Study:

To present a novel method for designing tunable quadrature filters specifically for phase shifting interferometry.
To develop a flexible approach applicable to various phase shifting algorithms.
To enhance the accuracy and adaptability of optical metrology techniques.

Main Methods:

A general tunable two-frame algorithm is introduced as a foundation.
Individual filters are derived based on quadrature conditions.
A convolution algorithm is employed to reconstruct the symmetric quadrature filter.

Main Results:

The proposed method successfully designs tunable quadrature filters.
The technique was applied to generate filters for four- and five-frame algorithms.
Demonstrated tunability allows adaptation to different interferometric setups.

Conclusions:

The presented method offers a robust approach for designing tunable quadrature filters in PSI.
This work contributes to improved accuracy and versatility in optical measurement.
The developed filters are valuable for advanced phase shifting interferometry applications.