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Electrospray Deposition of Uniform Thickness Ge23Sb7S70 and As40S60 Chalcogenide Glass Films
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Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides.

Candice Tsay1, Yunlai Zha, Craig B Arnold

  • 1Department of Electrical Engineering, Princeton University, Princeton, NJ 08544, USA.

Optics Express
|December 18, 2010
PubMed
Summary
This summary is machine-generated.

Soft lithography methods enable the integration of chalcogenide glass waveguides for infrared applications. These techniques overcome processing limitations, facilitating the development of advanced optical and photonic devices.

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Area of Science:

  • Materials Science
  • Optical Engineering
  • Nanotechnology

Background:

  • Chalcogenide glasses possess valuable optical properties for infrared (IR) communications and sensing.
  • Processing challenges hinder the integration of these photorefractive materials with optical components.
  • Developing scalable fabrication methods is crucial for advancing mid-IR photonic integrated circuits.

Purpose of the Study:

  • To demonstrate the viability of soft lithography for patterning and integrating chalcogenide glass waveguides.
  • To present two complementary methods, micro-molding in capillaries (MIMIC) and micro-transfer molding (µTM), for solution-processed chalcogenide waveguides.
  • To enable the fabrication of diverse mid-IR optical and photonic structures.

Main Methods:

  • Micro-molding in capillaries (MIMIC) was used to fabricate multi-mode arsenic trisulfide (As(2)S(3)) waveguides.
  • Micro-transfer molding (µTM) was employed to create arrays of single-mode rib waveguides.
  • Waveguide dimensions and edge roughness were characterized for process optimization.

Main Results:

  • MIMIC successfully integrated As(2)S(3) waveguides with quantum cascade lasers (QCLs).
  • µTM produced single-mode rib waveguides (2.5 µm wide, 4.5 µm high) over large areas (>6 cm(2)).
  • Edge roughness for µTM-fabricated waveguides was maintained below 5.1 nm.

Conclusions:

  • Soft lithography offers a viable route for integrating chalcogenide glass waveguides.
  • MIMIC and µTM provide complementary processes for fabricating diverse mid-IR photonic structures.
  • These methods facilitate the development of advanced components for infrared sensing and communication systems.