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Updated: Jun 5, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Jun Zhang1, Seung-Hune Yang, Youngsik Kim
1College of Optical Sciences, The University of Arizona, 1630 East University Boulevard, Tucson, Arizona 85721, USA. jzhangustcer@gmail.com
This study presents a novel microscope system for imaging Blu-ray discs through their protective layer. The system minimizes cover layer aberrations using a truncated solid immersion lens (SIL) for enhanced subsurface imaging.
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