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Elevated temperatures during electron beam induced deposition enhance nano-scale purity for precursors like W(CO)(6), though deposition yield decreases. This method offers improved material purity without altering deposition shape.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Surface Science

Background:

  • Electron beam induced deposition (EBID) is a nanofabrication technique.
  • Controlling precursor purity is crucial for high-quality nano-scale depositions.
  • Thermal assistance is explored as a method to improve EBID purity.

Purpose of the Study:

  • To investigate the effect of substrate temperature on the purity of nano-scale depositions using EBID.
  • To quantify the influence of temperature on various organic precursors.
  • To determine the optimal temperature range for purity enhancement.

Main Methods:

  • Systematic study of six organic precursors (W(CO)(6), TEOS, MeCpPtMe(3), Co(CO)(3)NO, Co(2)(CO)(8), Me(2)Auacac) under varying substrate temperatures (25-360°C).
  • Utilized two instruments to ensure reproducibility for Co(2)(CO)(8) and Me(2)Auacac.
  • Quantified deposition purity and yield as a function of temperature.

Main Results:

  • Elevated substrate temperatures generally improve deposition purity for most precursors.
  • Deposition shape remains consistent even with increased temperature.
  • Purity improvement comes at the expense of reduced deposition yield.
  • Tungsten hexacarbonyl (W(CO)(6)) showed significant purity increase from 36.7 to 59.2 at.% between 25°C and 280°C.
  • A transition region for cobalt precursors was identified, exhibiting seeded growth with high rates.

Conclusions:

  • Thermally assisted EBID is an effective method for enhancing the purity of nano-scale depositions.
  • The optimal temperature for purity improvement varies depending on the precursor.
  • A trade-off exists between purity enhancement and deposition yield.
  • Further research into the transition region for cobalt precursors could reveal new fabrication possibilities.