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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
High-Q Si microresonators formed by substrate transfer on silica waveguide wafers
W Ng1, T Rockwood, D Persechini
1HRL Laboratories, LLC, Malibu, California, 90265 USA. wwng@hrl.com
Optics Express
|January 4, 2011
Summary
We demonstrated silicon microresonators (MRs) on silica waveguides (WGs) using substrate transfer. These devices achieved high quality factors (≥10^4), enabling efficient light coupling for photonic applications.
Area of Science:
- Photonics
- Materials Science
- Nanotechnology
Background:
- Silicon photonics is crucial for integrated optical circuits.
- Microresonators offer compact and efficient light manipulation.
- Direct wafer bonding enables heterogeneous integration.
Purpose of the Study:
- To demonstrate silicon microresonators fabricated on silica waveguides via substrate transfer.
- To characterize the optical performance of these integrated devices.
- To evaluate coupling efficiency for potential photonic applications.
Main Methods:
- Substrate transfer of silicon microdisks onto a silica waveguide wafer.
- Direct wafer bonding of silicon layer.
- Measurement of throughput and drop spectra.
- Modeling of whispering gallery mode dispersion.
- Calculation of coupling coefficients.
Main Results:
- Successfully fabricated Si microresonators on silica waveguides.
- Achieved loaded quality factors (Qs) of ≥10^4.
- Demonstrated phase-matched coupling via mode dispersion analysis.
- Evaluated coupling coefficients using experimental data.
Conclusions:
- This work presents the first demonstration of Si MRs on silica WGs using substrate transfer.
- The achieved Q-factors and coupling characteristics are promising for integrated photonic devices.
- This fabrication method offers a viable route for advanced silicon-on-silica photonic circuits.
