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Updated: Jun 5, 2026

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Lan Zhang1, Yang Ju, Atsushi Hosoi
1Department of Mechanical Science and Engineering, Nagoya University, Furo-Cho, Chikusa-ku, Nagoya 4648603, Japan.
We developed microwave atomic force microscopy (AFM) to simultaneously map surface topography and electrical properties of materials at the nanoscale. This new technique achieved 120 nm resolution imaging of a gold film on glass.
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