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Updated: Jun 5, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Tuning temperature and size of hot spots and hot-spot arrays
Elika Saïdi1, Nicolas Babinet, Loïc Lalouat
1Laboratoire de Physique et d'Etude des Matériaux, UMR 8213 CNRS/ ESPCI/ UPMC, 10 Rue Vauquelin, 75231 Paris Cedex 5, France.
Abstract:
By using scanning thermal microscopy, it is shown that nanoscale constrictions in metallic microwires deposited on an oxidized silicon substrate can be tuned in terms of temperature and confinement size. High-resolution temperature maps indeed show that submicrometer hot spots and hot-spot arrays are obtained when the SiO(2) layer thickness decreases below 100 nm. When the SiO(2) thickness becomes larger, heat is less confined in the vicinity of the constrictions and laterally spreads all along the microwire. These results are in good agreement with numerical simulations, which provide dependences between silica-layer thickness and nanodot shape and temperature.
