Influence of a high vacuum on the precise positioning using an ultrasonic linear motor

This paper presents an investigation of the ultrasonic linear motor stage for use in a high vacuum environment. The slider table is driven by the hybrid bolt-clamped Langevin-type ultrasonic linear motor, which is excited with its different modes of natural frequencies in both lateral and longitudinal directions. In general, the friction behavior in a vacuum environment becomes different from that in an environment of atmospheric pressure and this difference significantly affects the performance of the ultrasonic linear motor. In this paper, to consistently provide stable and high power of output in a high vacuum, frequency matching was conducted. Moreover, to achieve the fine control performance in the vacuum environment, a modified nominal characteristic trajectory following control method was adopted. Finally, the stage was operated under high vacuum condition, and the operating performances were investigated compared with that of a conventional PI compensator. As a result, robustness of positioning was accomplished in a high vacuum condition with nanometer-level accuracy.