Normal-incidence multilayer mirrors for the 120-450 å wavelength region

An electron-beam deposition method is used to fabricate spherical and flat mirrors with a peak reflectivity of 20% for wavelengths between 120 and 450 Å. It is experimentally shown that the fabricated mirrors can be employed to form an image with a resolution of 1 μm for ultrasoft x rays. The possibility of producing intense directional high-temperature plasma radiation by spherical multilayer mirrors is demonstrated. A radiation intensity of 107 W/cm2 around 182 Å has been experimentally obtained in the laser plasma image plane.