The New NIST/ARPA National Soft X-Ray Reflectometry Facility

Area of Science:

• Optical physics
• Synchrotron radiation applications
• Materials science instrumentation

Background:

• The NIST/ARPA National Reflectometry Facility is undergoing significant upgrades.
• Current capabilities are limited to measuring optical components smaller than 10 cm.

Purpose of the Study:

• To detail recent upgrades to the NIST/ARPA National Reflectometry Facility.
• To introduce a new monochromator and an upcoming larger sample manipulator.
• To present preliminary performance data for the new monochromator.

Main Methods:

• Installation of a new high-throughput monochromator.
• Utilizing an existing sample manipulator for smaller optics (<10 cm).
• Planning for a future manipulator for larger optics.

Main Results:

• The new monochromator provides high throughput and modest resolution.
• Wavelength range of the monochromator is 3.5-40 nm.
• Preliminary measurements confirm the performance characteristics.

Conclusions:

• The upgraded facility will support advanced scientific and technological endeavors.
• Future installations will expand the facility's capacity for larger optics.
• The new monochromator represents a key improvement in reflectometry capabilities.