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Spectral and Angle-Resolved Magneto-Optical Characterization of Photonic Nanostructures
Published on: November 21, 2019
Optical analysis of an ultra-high resolution two-mirror soft x-ray microscope
D L Shealy1, C Wang, R B Hoover
1Department of Physics, University of Alabama at Birmingham, Birmingham, Alabama 35294-1170.
Journal of X-Ray Science and Technology
|February 11, 2011
Summary
Researchers are developing Schwarzschild multilayer soft x-ray microscopes for advanced imaging. Achieving ultra-high resolution requires controlling optical errors and optimizing multilayer coatings for future two-mirror microscopes.
Area of Science:
- Soft X-ray Microscopy
- Optical Engineering
- Materials Science
Background:
- Multilayer coated optics have shown success in soft x-ray imaging for solar physics and lithography.
- Schwarzschild microscopes are being developed for soft x-ray applications.
Purpose of the Study:
- To analyze the diffraction-limited performance of Schwarzschild soft x-ray microscopes.
- To identify factors limiting resolution in two-mirror soft x-ray microscopes.
- To investigate methods for achieving ultra-high resolution in these systems.
Main Methods:
- Simulations were used to determine the diffraction-limited performance of spherical Schwarzschild microscopes.
- Theoretical analysis explored the potential of two-aspherical mirror designs.
- Studies examined the impact of surface errors, microroughness, and coating variations on resolution.
Main Results:
- Spherical Schwarzschild microscopes are limited to numerical apertures around 0.15 for diffraction-limited performance.
- Two-aspherical mirror designs offer potential for very large numerical apertures.
- Surface contour errors, microroughness, and coating reflectance significantly degrade resolution.
Conclusions:
- Controlling optical errors and optimizing multilayer coatings are crucial for realizing ultra-high resolution in two-mirror soft x-ray microscopes.
- Graded spacing of multilayer coatings is necessary for fast, two-mirror microscope designs.
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