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Production of ultra thin silicon foils
1Institute for Synchrotron Radiation, Aarhus University, DK-8000 Aarhus C, Denmark.
Journal of X-Ray Science and Technology
|February 11, 2011
Abstract:
Ultra thin silicon foils with thicknesses below 100 nm and large diameters have been produced. Foils with a thickness of 50-60 nm have been used as supporting foils for zone plates and as vacuum windows withstanding a pressure difference of 1 atm.
