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Synchrotron X-ray Microdiffraction and Fluorescence Imaging of Mineral and Rock Samples
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Published on: June 19, 2018

Grazing x-ray reflectometry data processing by fourier transform.

F Bridou1, B Pardo

  • 1Institut d'Optique, L.A.14 du CNRS, Centre Universitaire, Bat 503, B.P.147, 91403 Orsay Cedex,France.

Journal of X-Ray Science and Technology
|February 11, 2011
PubMed
Summary

Grazing x-ray reflectometry (GXR) analyzes thin-layer stacks. Fourier analysis of GXR data provides a rough profile index, aiding in model selection for precise film parameter determination.

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Area of Science:

  • Materials Science
  • Surface Science
  • Analytical Chemistry

Background:

  • Thin-layer stacks are crucial in various technological applications.
  • Accurate characterization of film parameters is essential for performance.
  • Traditional fitting methods can be iterative and time-consuming.

Purpose of the Study:

  • To explore the utility of Fourier analysis for thin-layer stack characterization.
  • To provide a faster, preliminary method for determining film profile index.
  • To establish a complementary approach to traditional fitting methods in GXR.

Main Methods:

  • Grazing x-ray reflectometry (GXR) was employed to collect reflectivity data.
  • Fourier analysis was applied to the experimental reflectivity curves after transformation.
  • Results from Fourier analysis were used to guide trial-and-error fitting models.

Main Results:

  • Fourier analysis directly yields a rough estimation of the profile index.
  • Each Fourier peak corresponds to two interfaces, with roughness broadening the peaks.
  • X-ray absorption in the sample does not impede the Fourier analysis method.

Conclusions:

  • Fourier analysis is a valuable tool for initial GXR data interpretation.
  • This method aids in selecting appropriate models for detailed film parameter fitting.
  • GXR combined with Fourier analysis offers an efficient approach to thin-film characterization.