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A Parylene Bellows Electrochemical Actuator.

Po-Ying Li¹, Roya Sheybani, Christian A Gutierrez

¹Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089 USA ( poyingli@usc.edu ).

Journal of Microelectromechanical Systems : a Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems

|February 15, 2011

Summary

This study introduces a novel electrochemical actuator using Parylene bellows for significant deflection. This bio-compatible device achieves high pump efficiency, enabling low-power fluid pumping for medical applications.

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Area of Science:

Materials Science
Mechanical Engineering
Biomedical Engineering

Background:

Electrochemical actuators require large deflection capabilities for practical applications.
Existing designs often face limitations in biocompatibility and efficiency.
Parylene coatings offer promising properties for microfluidic devices.

Purpose of the Study:

To develop and characterize a novel electrochemical actuator utilizing Parylene bellows.
To achieve large deflection operation for fluid pumping applications.
To ensure biocompatibility for potential medical uses.

Main Methods:

Fabrication of Parylene C bellows using a sacrificial molding technique.
Integration of bellows with interdigitated electrodes to form an electrochemical actuator.

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Mechanical characterization and optimization of pump performance through geometrical analysis.

Main Results:

Demonstrated large deflection of over 1.5 mm with Parylene bellows.
Achieved a maximum pump efficiency of 90% with electroplated electrodes.
Successfully implemented real-time wireless operation of the actuator.

Conclusions:

The developed Parylene bellows electrochemical actuator enables large-deflection operation.
The bio-compatible nature of the materials makes it suitable for biological and medical applications.
Optimized design offers high efficiency for low-power fluid pumping.