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Cantilever tilt causing amplitude related convolution in dynamic mode atomic force microscopy.

Chunmei Wang¹, Jielin Sun, Hiroshi Itoh

¹School of Life Science and Biotechnology & Ministry of Education, Key Laboratory for Systems Biomedicine, Shanghai Jiaotong University, 800 Dongchuan Road, Shanghai 200240, P. R. China.

Analytical Sciences : the International Journal of the Japan Society for Analytical Chemistry

|February 16, 2011

Summary

Dynamic mode atomic force microscopy (AFM) topography is affected by probe vibration. A new model accounts for cantilever tilt, improving interpretation of AFM images for applications like critical dimension measurements.

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Area of Science:

Surface science
Nanotechnology
Microscopy

Background:

Atomic force microscopy (AFM) topography is a convolution of tip shape and sample geometry.
Classical convolution models are based on contact mode and static probes, not dynamic mode AFM.
The effect of probe vibration on convolution in dynamic mode AFM remains poorly understood, complicating topography interpretation.

Purpose of the Study:

To propose a new convolution model for dynamic mode AFM that incorporates cantilever tilt.
To investigate how probe vibration and cantilever tilt affect topography convolution in dynamic mode AFM.
To provide a framework for more accurate quantitative characterization in dynamic mode AFM.

Main Methods:

Development of a novel convolution model for dynamic mode AFM, considering cantilever tilt.
Theoretical analysis of the dynamic convolution influenced by amplitude and edge angles.
Experimental validation using a perpendicular SiO(2)/Si super-lattice structure.

Main Results:

The proposed model reveals a dynamic convolution distinct from contact mode, influenced by cantilever tilt.
The cantilever tilt introduces a dependence on the absolute amplitude value, particularly for sharp sample features.
Experimental results confirmed the model's predictions on a super-lattice structure.

Conclusions:

The new dynamic mode convolution model accurately describes AFM topography influenced by cantilever tilt.
This model enhances the understanding of probe-sample interactions in dynamic mode AFM.
The findings are crucial for precise probe characterization and critical dimension measurements in nanotechnology.