[Measurement of plasma parameters in slot microplasma by optical emission spectrum]

Slot microplasma was generated in argon and air mixture by using dielectric barrier discharge device with two parallel water electrodes. The molecular vibrational temperature, molecular rotational temperature and average electron energy of the slot plasma were studied by optical emission spectrum. The molecular vibrational temperature was calculated using the second positive system of nitrogen molecules ( C3 pi(u) --> B3 pi(g)). The molecular rotational temperature was calculated using the first negative system of nitrogen molecular ions ( B 2sigma(u)+ --> X sigma(g)+). The relative intensities of the first negative system of nitrogen molecular ions (391.4 nm) and nitrogen molecules in the excitation level (337.1 nm) emission spectrum line were measured for studying the variations of electron energy. It was found that the molecular vibrational temperature, molecular rotational temperature and average electron energy decrease with gas pressure increasing.