Characterization and inspection of microlens array by single cube beam splitter microscopy.

Weijuan Qu1, Oi Choo Chee, Yingjie Yu

  • 1Ngee Ann Polytechnic, 535 Clementi Road, 599489 Singapore. qwe2@np.edu.sg

Applied Optics
|February 24, 2011
PubMed
Summary

A novel single cube beam splitter (SCBS) microscope enables efficient micro-optics characterization. This SCBS microscope provides dual-channel imaging and off-axis digital holograms for detailed microlens array uniformity inspection.