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Bilayer Microfluidic Device for Combinatorial Plug Production
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A Parylene MEMS Electrothermal Valve.

Po-Ying Li1, Tina K Givrad, Daniel P Holschneider

  • 1Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089 USA ( poyingli@usc.edu ).

Journal of Microelectromechanical Systems : a Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems
|February 26, 2011
PubMed
Summary
This summary is machine-generated.

Researchers developed a novel, low-power microelectromechanical-system electrothermal valve using Parylene C. This rapid-operating valve is ideal for wirelessly controlled implantable drug-delivery systems and demonstrated in vivo functionality.

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Area of Science:

  • Biomedical Engineering
  • Materials Science
  • Microfluidics

Background:

  • Microelectromechanical systems (MEMS) are crucial for advanced medical devices.
  • Existing valves often face limitations in power consumption and operational speed.
  • Parylene C offers unique properties for biocompatible micro-devices.

Purpose of the Study:

  • To introduce the first Parylene C-based normally closed electrothermal MEMS valve.
  • To demonstrate its low power consumption and rapid response.
  • To validate its utility in implantable drug-delivery systems and in vivo applications.

Main Methods:

  • Fabrication of a normally closed electrothermal valve using Parylene C.
  • Theoretical analysis and computational modeling of valve design.
  • Benchtop characterization of valve operation in air and water.
  • Integration with catheters and a wirelessly operated microbolus infusion pump.

Main Results:

  • Achieved low valve-opening power: 22 mW in air and 33 mW in water.
  • Demonstrated rapid millisecond-level operation.
  • Successfully integrated the valve into a wirelessly controlled microbolus infusion pump.
  • Confirmed in vivo functionality for potential brain mapping applications.

Conclusions:

  • The Parylene C electrothermal valve offers a promising solution for low-power, rapid-response microfluidic control.
  • Its successful in vivo demonstration highlights its potential for advanced implantable drug-delivery systems.
  • This technology could enable future applications in areas like precise neuroscientific research and targeted therapies.