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Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Thermomechanical properties of polymer nanolithography using atomic force microscopy
Te-Hua Fang1, Cheng-Da Wu, Shao-Hui Kang
1Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, 415 Chien Kung Road, Kaohsiung 807, Taiwan. fang.tehua@msa.hinet.net
Summary
Heating polyethylene terephthalate (PET) polymers increases groove width and wear depth. Higher temperatures significantly enhance material removal rates during nanolithography, impacting mechanical properties.
Area of Science:
- Materials Science
- Polymer Science
- Nanotechnology
Background:
- Understanding the temperature-dependent mechanical properties of polymers like polyethylene terephthalate (PET) is crucial for applications involving thermal cycling or elevated temperatures.
- Previous studies have explored PET's mechanical behavior, but a detailed investigation combining nanolithography with controlled heating is less common.
Purpose of the Study:
- To investigate the influence of temperature on the mechanical properties of PET polymers.
- To quantify the changes in groove dimensions and material removal rates under varying thermal conditions.
- To explore the relationship between adhesion force, temperature, and material removal during nanolithography.
Main Methods:
- Utilized atomic force microscope (AFM) nanolithography combined with controlled heating techniques (20-60 °C).
- Measured force-distance curves and adhesion forces to assess mechanical responses.
- Analyzed groove width and wear depth resulting from nanolithography at different temperatures and loads (30-50 nN).
Main Results:
- Groove widths on PET polymers ranged from 14-363 nm at 20-60 °C.
- Wear depth significantly increased with rising heating temperature.
- Material removal volume at 30-60 °C (251.85-2422.66 μm³) was substantially higher than at room temperature (26.60-70.30 μm³).
- Contact forces increased at 9 nN, and hole size was pressure-dependent.
Conclusions:
- Temperature significantly affects the mechanical properties and nanomachining behavior of PET.
- Increased temperature leads to enhanced material removal rates, with implications for surface modification and wear.
- The findings provide insights into the interplay between temperature, adhesion, pressure, and material removal in polymer nanolithography.

