Thermomechanical properties of polymer nanolithography using atomic force microscopy

Te-Hua Fang1, Cheng-Da Wu, Shao-Hui Kang

  • 1Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, 415 Chien Kung Road, Kaohsiung 807, Taiwan. fang.tehua@msa.hinet.net

Micron (Oxford, England : 1993)
|March 1, 2011
PubMed
Summary

Heating polyethylene terephthalate (PET) polymers increases groove width and wear depth. Higher temperatures significantly enhance material removal rates during nanolithography, impacting mechanical properties.