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Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror
Lin Liu1, Lei Wu, Jingjing Sun
1University of Florida, Department of Electrical and Computer Engineering, Gainesville, Florida 32611-6130, USA. linliu86@ufl.edu
Abstract:
We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning ± 16° at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system.
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