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Silicon-polymer hybrid slot waveguide ring-resonator modulator.

Michael Gould1, Tom Baehr-Jones, Ran Ding

  • 1Department of Electrical Engineering, University of Washington, Seattle, WA 98195, USA. michael.gould@mail.mcgill.ca

Optics Express
|March 4, 2011
PubMed
Summary

We developed a silicon-polymer hybrid slot waveguide ring-resonator modulator. This device achieves 12.7 pm/V tunability at radio frequency speeds, offering a promising platform for optical modulation.

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Area of Science:

  • Photonics and Optical Engineering
  • Materials Science

Background:

  • Ring-resonator modulators are crucial for optical communication systems.
  • Silicon-based modulators often face limitations in tuning efficiency and fabrication complexity.
  • Hybrid approaches combining silicon and polymers offer potential for enhanced performance.

Purpose of the Study:

  • To demonstrate a novel silicon-polymer hybrid slot waveguide ring-resonator modulator.
  • To evaluate its performance in terms of tunability and bandwidth.
  • To compare its fabrication method and performance with existing technologies.

Main Methods:

  • Fabrication of silicon-polymer hybrid slot waveguides using 193 nm optical lithography.
  • Integration of these waveguides into a ring-resonator structure.

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  • Characterization of the modulator's tunability and radio frequency (RF) bandwidth.

    • Main Results:

    • Achieved a high tunability of 12.7 pm/V at RF speeds.
    • Demonstrated a bandwidth of 1 GHz for optical wavelengths near 1550 nm.
    • Utilized optical lithography, a more scalable fabrication method compared to electron beam lithography.

    Conclusions:

    • The silicon-polymer hybrid slot waveguide modulator offers competitive tunability compared to state-of-the-art ring-based modulators.
    • The demonstrated performance suggests potential for improved optical modulation.
    • Further processing improvements could enhance the speed limitations, paving the way for advanced photonic devices.