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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Integrated array of 2-μm antimonide-based single-photon counting devices.

M A Diagne1, M Greszik, E K Duerr

  • 1Lincoln Laboratory, Massachusetts Institute of Technology, 244 Wood Street, Lexington, Massachusetts 02420-9108, USA. mdiagne@ll.mit.edu

Optics Express
|March 4, 2011
PubMed
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A novel 32x32 antimony-based Geiger-mode avalanche photodiode array enables 3D imaging at 2 μm. This photon-detecting array with integrated readout electronics achieved low dark count rates for object imaging.

Area of Science:

  • Optoelectronics
  • Photonics
  • Semiconductor device physics

Background:

  • Geiger-mode avalanche photodiodes (GM-APDs) are crucial for photon counting applications.
  • Developing large-format arrays with high sensitivity and temporal resolution is an ongoing challenge.
  • 2 μm wavelength operation is important for specific imaging and sensing applications.

Purpose of the Study:

  • To present a 32x32 antimony-based GM-APD array for 3D imaging.
  • To demonstrate the performance of the array hybridized with a readout integrated circuit (ROIC).
  • To evaluate the array's capabilities at 2 μm wavelength.

Main Methods:

  • Fabrication of a 32x32 Sb-based GM-APD array.
  • Hybridization of the APD array with a custom ROIC.

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  • Characterization of the hybridized array at 77 K with a 1 V overbias.
  • Acquisition of 3D range images using the developed system.

    • Main Results:

    • The 1000-element focal plane array demonstrated photon detection and arrival time recording per pixel.
    • An average dark count rate of 1.5 kHz was achieved at 77 K with 1 V overbias.
    • Successful acquisition of three-dimensional range images of objects was demonstrated.

    Conclusions:

    • The developed Sb-based GM-APD array offers 3D imaging capabilities at 2 μm.
    • The array's performance, including low dark count rate, is suitable for advanced imaging systems.
    • This technology advances the development of high-performance photon-counting arrays for scientific and industrial applications.