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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Integrated array of 2-μm antimonide-based single-photon counting devices.
M A Diagne1, M Greszik, E K Duerr
1Lincoln Laboratory, Massachusetts Institute of Technology, 244 Wood Street, Lexington, Massachusetts 02420-9108, USA. mdiagne@ll.mit.edu
Optics Express
|March 4, 2011
Summary
A novel 32x32 antimony-based Geiger-mode avalanche photodiode array enables 3D imaging at 2 μm. This photon-detecting array with integrated readout electronics achieved low dark count rates for object imaging.
Area of Science:
- Optoelectronics
- Photonics
- Semiconductor device physics
Background:
- Geiger-mode avalanche photodiodes (GM-APDs) are crucial for photon counting applications.
- Developing large-format arrays with high sensitivity and temporal resolution is an ongoing challenge.
- 2 μm wavelength operation is important for specific imaging and sensing applications.
Purpose of the Study:
- To present a 32x32 antimony-based GM-APD array for 3D imaging.
- To demonstrate the performance of the array hybridized with a readout integrated circuit (ROIC).
- To evaluate the array's capabilities at 2 μm wavelength.
Main Methods:
- Fabrication of a 32x32 Sb-based GM-APD array.
- Hybridization of the APD array with a custom ROIC.
- Characterization of the hybridized array at 77 K with a 1 V overbias.
- Acquisition of 3D range images using the developed system.
Main Results:
- The 1000-element focal plane array demonstrated photon detection and arrival time recording per pixel.
- An average dark count rate of 1.5 kHz was achieved at 77 K with 1 V overbias.
- Successful acquisition of three-dimensional range images of objects was demonstrated.
Conclusions:
- The developed Sb-based GM-APD array offers 3D imaging capabilities at 2 μm.
- The array's performance, including low dark count rate, is suitable for advanced imaging systems.
- This technology advances the development of high-performance photon-counting arrays for scientific and industrial applications.
