Updated: Jun 4, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
M A Diagne1, M Greszik, E K Duerr
1Lincoln Laboratory, Massachusetts Institute of Technology, 244 Wood Street, Lexington, Massachusetts 02420-9108, USA. mdiagne@ll.mit.edu
A novel 32x32 antimony-based Geiger-mode avalanche photodiode array enables 3D imaging at 2 μm. This photon-detecting array with integrated readout electronics achieved low dark count rates for object imaging.
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