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Directed fracture for the fabrication of free-standing multilayered submicrometer structures

Roberto R Robaina1, María José López-Martínez, Jaume Esteve

  • 1Institut de Microelectrònica de Barcelona, IMB-CNM (CSIC), Campus UAB, 08193 Cerdanyola, Barcelona, Spain.

Small (Weinheim an Der Bergstrasse, Germany)
|March 4, 2011
PubMed
Abstract

No abstract available in PubMed .

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