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Updated: Jun 3, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10:25

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Practical spatial resolution of electron energy loss spectroscopy in aberration corrected scanning transmission

A B Shah1, Q M Ramasse, J G Wen

  • 1Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.

Micron (Oxford, England : 1993)
|March 8, 2011
PubMed

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