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Local doping of silicon using nanoimprint lithography and molecular monolayers

W Pim Voorthuijzen1, M Deniz Yilmaz, Wouter J M Naber

  • 1Molecular Nanofabrication Group, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.

Advanced Materials (Deerfield Beach, Fla.)
|March 15, 2011
PubMed
Abstract

No abstract available in PubMed .

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